PHS8310E - Microfabrication

Introduction to micro- and nano-fabrication. Photolithography: optical technology and photoresists. Thin films: physical processes (evaporation, sputtering and laser), chemical processes, electrochemical processes and oxidation. Etching: wet and dry (plasma). Fundamentals of nanofabrication. Processes for microelectronics, for photonics, for micro-electro-mechanical systems, and bio sensors. Applications of microfabrication. Laboratory of microfabrication.